What it is
Life-cycle assessment of ALD processes — an inventory model for precursors, carrier gases, and energy use, toward a defensible per-layer environmental footprint. Ongoing work; details to follow.
ALD Life-Cycle Assessment
Cradle-to-gate LCA of atomic layer deposition processes — quantifying precursor consumption, energy intensity, and emissions per functional unit for sustainable semiconductor processing.
2026-07
Photo 1 — coming soon
Photo 2 — coming soon
Photo 3 — coming soon
ALDLCASustainability